| 2003 №03 (09) | 2003 №03 (01) |
The Paton Welding Journal, 2003, #3, 45-46 pages
Installation for magnetron sputtering of coatings on glass panels
M.L. Zhadkevich, V.N. Trofimyak
E.O. Paton Electric Welding Institute of the NASU 11 Kazymyr Malevych Str., 03150, Kyiv, Ukraine.Abstract
The paper deals with an all-purpose unit for magnetron sputtering for applying the reflecting and other kinds of coatings on sheet materials.
Keywords: coating application, magnetron sputtering, reflecting coating, glass panels, cyclic-action unit, vacuum chamber
References
1. Serdyuk, V.I., Gnatyuk, O.V. (2001) Improvement of methods for increasing quality of vacuum coatings. The Pa ton Welding J., 8, 53−54.2. Danilin, B.S. (1989) Application of low-temperature plasma in thin film deposition. Moscow: Energoatomizdat
Suggested Citation
M.L. Zhadkevich, V.N. Trofimyak (2003) Installation for magnetron sputtering of coatings on glass panels. The Paton Welding J., 03, 45-46.The cost of subscription/purchase order journals or individual articles
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