The Paton Welding Journal, 2022, №09



2022 №09 (02)

DOI of Article 10.37434/tpwj2022.09.03

2022 №09 (04)

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The Paton Welding Journal, 2022, #9, 15-20 pages

Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings

Yu.S. Borysov¹, O.V. Volos¹, N.V. Vigilyanska¹, V.G. Zadoya¹, V.V. Strelchuk²

¹E.O. Paton Electric Welding Institute of the NAS of Ukraine. 11 Kazymyr Malevych Str., 03150, Kyiv, Ukraine. E-mail: office@paton.kiev.ua
²V.E. Lashkaryov Institute of Semiconductor Physics of the NAS of Ukraine. 45 Nauki Ave., 02000, Kyiv, Ukraine

Abstract
Sputtering of CNx-coatings was carried out using two magnetron devices with titanium and graphite targets in the mixture of Ar/N2 gases. The influence of gas mixture (Ar/N2) composition, pressure (0.35, 1 and 2 Pa) and temperature (100…200 °C) on the structure of CNx coatings were investigated. It was found that the structure of the coating has an amorphous disordered graphite-like structure with sp3-, sp2- and sp1 electron bonds of carbon. The most ordered structure is observed in CNx coatings (the least ID/IG = 1.16 and 1.2), produced at a pressure of 0.35 Pa, the temperature of the specimen is 130 °C, the content of nitrogen is 40 and 58%. The influence of a titanium sublayer and a transition TiCN layer on adhesive properties of CNx coatings was studied. When a titanium sublayer and a transition TiCN layer are used together, the adhesion of the coating to the bases of titanium and Kh18N10Т steel grows at a thickness of coating being 2...3 μm. 15 Ref., 2 Tabl., 6 Fig.
Keywords: magnetron sputtering, CNx coating, structure, phase composition, Raman spectroscopy

Received: 04.07.2022
Accepted: 11.11.2022

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