2022 №09 (02) DOI of Article
2022 №09 (04)

The Paton Welding Journal 2022 #09
The Paton Welding Journal, 2022, #9, 15-20 pages

Influence of parameters of magnetron sputtering process on phase composition and structure of carbon nitride coatings

Yu.S. Borysov1, O.V. Volos1, N.V. Vigilyanska1, V.G. Zadoya1, V.V. Strelchuk2

1E.O. Paton Electric Welding Institute of the NAS of Ukraine. 11 Kazymyr Malevych Str., 03150, Kyiv, Ukraine. E-mail:
2V.E. Lashkaryov Institute of Semiconductor Physics of the NAS of Ukraine. 45 Nauki Ave., 02000, Kyiv, Ukraine

Sputtering of CNx-coatings was carried out using two magnetron devices with titanium and graphite targets in the mixture of Ar/N2 gases. The influence of gas mixture (Ar/N2) composition, pressure (0.35, 1 and 2 Pa) and temperature (100…200 °C) on the structure of CNx coatings were investigated. It was found that the structure of the coating has an amorphous disordered graphite-like structure with sp3-, sp2- and sp1 electron bonds of carbon. The most ordered structure is observed in CNx coatings (the least ID/IG = 1.16 and 1.2), produced at a pressure of 0.35 Pa, the temperature of the specimen is 130 °C, the content of nitrogen is 40 and 58%. The influence of a titanium sublayer and a transition TiCN layer on adhesive properties of CNx coatings was studied. When a titanium sublayer and a transition TiCN layer are used together, the adhesion of the coating to the bases of titanium and Kh18N10Т steel grows at a thickness of coating being 2...3 μm. 15 Ref., 2 Tabl., 6 Fig.
Keywords: magnetron sputtering, CNx coating, structure, phase composition, Raman spectroscopy

Received: 04.07.2022
Accepted: 11.11.2022


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